Large-grain polycrystalline silicon films with low intragranular defect density by low-temperature solid-phase crystallization without underlying oxide

Journal of Applied Physics

Volumn 91, Issue 5, 2002, Pages 2910-2915

  Bo, Xiang Zheng ^a   Yao, Nan ^a   Shieh, Sean R ^b   Duffy, Thomas S ^b   Sturm, J C ^a  

^a Princeton University   (United States)

^b PRINCETON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33845463417     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1448395     Document Type: Article

References (23)

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