Nanoscale topography control for the fabrication of advanced diffractive optics

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 6, 2003, Pages 2980-2984

  Liddle, J Alexander ^a   Salmassi, Farhad ^a   Naulleau, Patrick P ^a   Gullikson, Eric M ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; DIFFRACTION GRATINGS; ELECTRIC INSULATORS; ELECTRON BEAM LITHOGRAPHY; MAGNETS; MULTILAYERS; PHOTORESISTORS; SURFACE ROUGHNESS; SURFACE TOPOGRAPHY;

COATED GRATINGS; GRATING SURFACES;

DIFFRACTIVE OPTICS;

EID: 0942267518     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1622938     Document Type: Conference Paper

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