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Journal of Applied Physics

Volumn 103, Issue 6, 2008, Pages

Surface reconstruction evolution and anatase formation in the process of oxidation of titanium nitride film

(7) Wu, S X a Liu, Y J a Xing, X J a Yu, X L a Xu, L M a Yu, Y P a Li, S W a

a SUN YAT SEN UNIVERSITY (China)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; OXIDATION; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SYNTHESIS (CHEMICAL); THIN FILMS; TITANIUM DIOXIDE; TITANIUM NITRIDE;

OXYGEN PLASMA; RECONSTRUCTION DOMAINS;

SURFACE RECONSTRUCTION;

EID: 41549095519 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.2899179 Document Type: Article

Times cited : (6)

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