Assessment of the performance of scanning capacitance microscopy for n -type gallium nitride

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 2, 2008, Pages 611-617

  Sumner, J ^a   Oliver, R A ^a   Kappers, M J ^a   Humphreys, C J ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CARRIER CONCENTRATION; SCANNING ELECTRON MICROSCOPY; SECONDARY ION MASS SPECTROMETRY;

SCANNING CAPACITANCE MICROSCOPY; SPATIAL RESOLUTION;

GALLIUM NITRIDE;

EID: 41549084209     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2890705     Document Type: Article

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