Layer-by-layer sputtering of Si(111) and (001) surfaces mediated by surface vacancy diffusion: Surface physics and application for nanofabrication

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2666-2671

  Watanabe, Heiji ^a   Ichikawa, Masakazu ^a  

^a NATL INST FOR ADV INTERDISC RES   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4143131153     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589705     Document Type: Article

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