Fabrication of nanostructures on silicon surfaces on wafer scale by controlling self-organization processes

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 4134-4139

  Ogino, T ^a   Hibino, H ^a   Prabhakaran, K ^a  

^a Kashino Diverse Brain Research Laboratory of NTT Communication Science Laboratories   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000038421     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588606     Document Type: Article

References (29)

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