Inscription and characterization of micro-structures in silicate, FOTURAN™ and tellurite glasses by femtosecond laser direct writing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6881, Issue , 2008, Pages

  Vishnubhatla, K C ^a   Rao, S Venugopal ^a   Kumar, R Sai Santosh ^a   Prasad, K Shiva ^b   Prasad, P S R ^b   Rao, D Narayana ^a  

^a UNIVERSITY OF HYDERABAD   (India)

^b NATIONAL GEOPHYSICAL RESEARCH INSTITUTE   (India)

Author keywords

Femtosecond direct writing; Foturan; Micro structures; Multiphoton absorption

Indexed keywords

GLASS; MICROSTRUCTURE; RAMAN SPECTROSCOPY; ULTRASHORT PULSES;

FEMTOSECOND DIRECT WRITING; FOTURAN; MULTIPHOTON ABSORPTION;

SILICATES;

EID: 41149171706     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.762907     Document Type: Conference Paper

References (93)

1. J. A. Lewis, G.M. Gratson, Materials Today, 7(7-8), 32-39, 2004.
2. D.B. Chrisey, Science 289, 879, 2000.
3. K.M. Davis, K. Miura, N. Sugimoto, and K. Hirao, Opt. Lett. 21, 1729-1731, 1996;
4. K. Miura, J. Qiu, H. Inouye, T. Mitsuyu and K. Hirao, "Photowritten optical waveguides in various glass with ultrahosrt pulse laser", App. Phys. Lett., 71, 3329-3331, 1997.
5. C.B. Schaffer, A. Brodeur, J.F. Garcia, and E. Mazur, Opt. Lett. 26, 93-95 2001.
6. 2+in a fluorozirconate glass", Opt. Lett., Vol. 24, pp. 786-788, 1999.
7. E.N. Glezer and E. Mazur, "Ultrafast-laser beam micro-explosions in transparent materials", Appl. Phys. Lett., Vol. 71, pp. 882-884, 1997.
8. Y. Shimotsuma, K. Hirao, J. Qiu, K. Miura, "Nanofabrication in transparent materials with a femtosecond pulse laser," J. Non-Cryst. Solids 352, 646-656, 2006.
9. K. Itoh, W. Watanabe, "Toward nano- and microprocessing in glass with femtosecond laser pulses," Riken Review, 50, 90-94, 2003;
10. K. Itoh, W. Watanabe, S. Nolte, C.B. Schafer, "Ultrafast processes for bulk modification of transparent materials," MRS Bulletin 31,620-625,2006.
11. K. Itoh, "Laser microengineering of photonic devices in glass," JLMN-Journal of Laser Micro/Nanoengineering, 1(1), 1-6, 2006;
12. K. Sugioka, Y. Hanada, K. Midorikawa, "3D integration of microcomponents in a single glass chip femtosecond laser direct writing for biochemical analysis," Appl. Surf. Sci. 253, 6595-6598, 2007.
13. M. Kohtoku, T. Kominato, Y. Nasu, and T. Shibata, "New Waveguide Fabrication Techniques for Next-generation PLCs," NTT Technical Review 3(7), July 2005.
14. J. Qiu, "Femtosecond laser-induced microstructures in glasses and applications in micro-optics," The Chemical Record, 4, 50-58, 2004.
15. K. Sugioka, Y. Cheng, and K. Midorikawa, "Ultrafast Laser Processing for Lab-on-a-Chip Device Manufacture," Mater. Res. Soc. Symp. Proc. Vol. 850, MM1.3.1-MM1.3.12, 2005.
16. S. Nolte, D. Blomer, J. Burghoff, A. Szameit, M. Will, A. Tunnermann, "Ultrafast laser processing - novel options for photonic device production," Glass Science and Technology 78, 141-147, Suppl. C, 2005.
17. J. Kruger, W. Kautek, "Ultrashort pulse laser interaction with dielectrics and polymers," Adv. Poly. Sci. 168, 247-289, 2004.
18. S. Kawata, H.-B. Sun, T. Tanaka, K. Takada, "Finer features for functional microdevices," Nautre 412, 697, 2001.
19. H.B. Sun, S. Kawata, "Two-photon photopolymerization and 3D lithographic microfabrication," Adv. Polymer Sc. 170, 169-273, 2004.
20. V. Apostolopoulos, L. Laversenne, T. Colomb, C. Depeursinge, R. P. Slathé, M. Pollnau, R. Osellame, G. Cerullo and P. Laporta, "Femtosecond-irradiation-induced refractive-index changes and channel waveguiding in bulk Ti3+:Sapphire," Appl. Phys. Lett. 85, 1122-1124 (2004);
21. S. Juodkasis, K. Nishimura, S. Tanaka, H. Misawa, E. G. Gamaly, B. Luther-Davies, L. Hallo, P. Nicolai, V. T. Tikhonchuk, "Laser-induced microexplosion confined in the bulk of a sapphire crystal: Evidence of multimegabar pressures," Phys. Rev. Lett. 96, 166101, 2006.
22. G. A. Torchia, P. F. Meilán, A. Rodenas, D. Jaque, C. Mendez, and L. Roso, "Femtosecond laser written surface waveguides fabricated in Nd: YAG ceramics," Opt. Express 15, 13266-13271, 2007.
23. J. Lamela, A. Rodenas, D. Jaque and F. Jaque, "Near-field optical and micro-luminescence investigations of femtosecond laser micro-structured Nd:YAG crystals," Opt. Express 15, 3285-3290, 2007.
24. A. Zoubir, C. Lopez, M. Richardson, and K. Richardson, "Femtosecond laser fabrication of tubular waveguides in poly(methyl methacrylate)," Opt. Lett. 29, 1840-1842, 2004.
25. W. Watanabe, S. Sowa, T. Tamaki, K. Itoh,J. Nishii, "Three- Dimensional Waveguides Fabricated in Poly(methyl methacrylate) by a Femtosecond Laser," Japanese Journal of Applied Physics 45(29), L765-L767, 2006.
26. R.R. Thomson, S. Campbell, I.J. Blewett, A.K. Kar, D.T. Reid, "Optical waveguide fabrication in Z-cut lithium niobate using femtosecond pulses in the low repetition rate regime," Appl. Phys. Lett. 88, 111109, 2006.
27. R. Osellame, M. Lobino, N. Chiodo, M. Marangoni, G. Cerullo, R. Ramponi, H.T. Bookey, R.R. Thomson, N. D. Psaila and A.K. Kar, "Femtosecond laser writing of waveguides in periodically poled lithium niobate preserving the nonlinear coefficient," Appl. Phys. Lett. 90, 241107, 2007.
28. A. Ródenas, J. A. Sanz Garcia, D. Jaque, G. A. Torchia, C. Mendez, I. Arias, L. Roso and F. Agulló-Rueda, "Optical investigations of femtosecond laser induced microstress in neodymium doped lithium Niobate crystals," J. Appl. Phys. 100, 033521, 2006.
29. S. Taccheo, G. Della Valle, R. Osellame, G. Cerullo, N. Chiodo, P. Laporta, O. Svelto, A. Killi, U. Morgner, M. Lederer, D. Kopf, "Er:Yb-doped waveguide laser fabricated by femtosecond laser pulses," Opt. Lett. 29, 2626-2628, 2004.
30. G. Della Valle, R. Osellame, N. Chiodo, S. Taccheo, G. Cerullo, P. Laporta, A. Killi, U. Morgner, M. Lederer, and D. Kopf, "C-band waveguide amplifier produced by femtosecond laser writing," Opt. Express 13, 5976-5982, 2005;
31. R. Osellame, N. Chiodo, G.Della Valle, G.Cerullo, R. Ramponi, P.Laporta, A.Killi, U.Morgner, O. Svelto, "Waveguide lasers in the C-band fabricated by laser inscription with a compact femtosecond oscillator," IEEE J. Sel. Top. Quantum Electron. 12, 227-285, 2006.
32. D. Day and M. Gu, "Microchannel fabrication in PMMA based on localized heating by nanojoule high repetition rate femtosecond pulses," Opt. Exp. 12(16), 5939-5945, 2005.
33. V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, P.L. Cavllotti, " Fabrication of long microchannels with circular cross section using astigmatically shaped femtosecond pulses and chemical etching," Appl. Phys. Lett. 88, 191107, 2006.
34. Isamu Miyamoto, Alexander Horn, Jens Gottmann, Dirk Wortmann, Fumiyo Yoshino, "Fusion Welding of Glass Using Femtosecond Laser Pulses with High-repetition Rates," JLMN-Journal of Laser Micro/Nanoengineering 2(1), 57-63, 2007.
35. A. Saliminia, N.T. Nguyen, M.-C. Nadeau, S. Petit, S.L. Chin, R. Vallée, "Writing optical waveguides in fused silica using 1 kHz femtosecond IR pulse", Journal of Applied Physics, 93, 3724-3728, 2003.
36. A. Saliminia, N.T. Nguyen, S.L. Chin and R. Vallée, "The influence of self-focusing and filamentation on refractive index modifications in fused silica using intense femtosecond pulses", Optics Communications, 241(4-6), 529-538, 2004.
37. J.W. Chan, T. Huser, S. Risbud, and D. Krol, "Structural changes in fused silica after exposure to focused femtosecond laser pulses," Opt. Lett. 26, 1726-1728, 2001.
38. J. W. Chan, T. R. Huster, S. H. Risbud, and D. M. Krol, "Modification of the fused silica glass network associated with waveguide fabrication using femtosecond laser pulses," Appl. Phys. A76, 367-372, 2003.
39. W.J. Reichman, D.M. Krol, L. Shah, F. Yoshino, A. Arai, S.M. Eaton, P.R. Herman, "A spectroscopic comparison of femtosecond-laser-modified fused silica using kilohertz and megahertz laser systems," J. Appl. Phys. 99, 123112, 2006.
40. W. Reichman, J.W. Chan, D.M. Krol, "Confocal fluorescence and Raman microscopy of femtosecond laser-modified fused silica," J. Phys.: Condensed Matter 15, S2447 - S24456, 2003.
41. G.D. Marshall, M. Ams, M.J. Withford, "Direct laser written waveguide-Bragg gratings in bulk fused silica", Opt. Lett. 31(18), 2690-2692, 2006.
42. Q. Sun, H. Jiang, Y. Liu, Y. Zhou, H. Yang, and Q. Gong, "Effect of spherical aberration on the propagation of a tightly focused femtosecond laser pulse inside fused silica," J. Opt. A: Pure Appl. Opt. 7, 655-659, 2005.
43. H. Zhang, S.M. Eaton, P.R. Herman, "Low-loss Type II waveguide writing in fused silica with single picosecond laser pulses," Opt. Exp. 14(11) 4826-4834, 2006.
44. A.Q. Wu, I.H. Chowdhury, and X. Xu, "Femtosecond laser absorption in fused silica: Numerical and experimental investigation," Phys. Rev. B 72, 085128, 2005.
45. E. Toratani, M. Kamata, and M. Obara, "Self-fabrication of void array in fused silica by femtosecond laser processing," Appl. Phys. Lett. 87, 171103, 2005.
46. V.R. Bhardwaj, P.B. Corkum, D.M. Rayner, C. Hnatovsky, E. Simova, R.S. Taylor, "Stress in femtosecond-laser-written waveguides in fused silica," Opt. Lett. 29(12), 1312-1314, 2004.
47. C. Hnatovsky, R.S. Taylor, E. Simova, V.R. Bhardwaj, D.M. Rayner, P.B. Corkum, "Polarization-selective etching in femtosecond laser-assisted microfluidic channel fabrication in fused silica," Opt. Lett. 30(14), 1867-1869, 2005.
48. C. Hnatovsky, R.S. Taylor, P.P. Rajeev, E. Simova, V.R. Bhardwaj, D.M. Rayner, P.B. Corkum, "Pulse duration dependence of femtosecond-laser- fabricated nanogratings in fused silica," Appl. Phys. Lett. 87, 014104, 2005.
49. C. Hnatovsky, R.S. Taylor, E. Simova, V.R. Bhardwaj, D.M. Rayner, P.B. Corkum, "High-resolution study of photoinduced modification in fused silica produced by a tightly focused femtosecond laser beam in the presence of aberrations," J. Appl. Phys. 98, 013517, 2005.
50. V.R. Bhardwaj, E. Simova, P.P. Rajeev, C. Hnatovsky, R.S. Taylor, D.M. Rayner, P.B. Corkum, "Optically produced arrays of planar nanostructures inside fused silica," Phys. Rev. Lett. 96, 057404, 2006.
51. J. Liu, Z. Zhang, S. Chang, C. Flueraru, C.P. Grover, "Directly writing of 1-to-N optical waveguide power splitters in fused silica glass using a femtosecond laser", Opt. Commun. 253(4-6), 315-319, 2005.
52. L. Shah, A.Y. Arai, "Waveguide writing in fused silica with a femtosecond fiber laser at 522 nm and 1 MHz repetition rate," Opt. Exp. 13(6), 1999-2006, 2005.
53. M. Will, S. Nolte, B. N. Chichkov, and A. Tunnermann, "Optical properties of waveguides fabricated in fused silica by femtosecond laser pulses," Appl. Opt. 41, 4360-4364, 2002.
54. A. Szameit, D. Blomer, J. Burghoff, T. Schreiber, T. Pertsch, S. Nolte, A. Tunnermann, F. Lederer, "Discrete nonlinear localization in femtosecond laser written waveguides in fused silica," Opt. Exp. 13(26), 10552-10557, 2005.
55. M. Kamata, M. Obara, "Control of the refractive index change in fused silica glasses induced by a loosely focused femtosecond laser," Appl. Phys. A. 78, 85-88, 2004.
56. J.R. Vazquez de Aldana, C. Mendez, L. Roso, "Saturation of ablation channels micro-machined in fused silica with many femtosecond laser pulses," Opt. Exp. 14(3), 1329-1338, 2006.
57. A. Zoubir, M. Richardson, L. Canioni, A. Brocas, L. Sarger, "Optical properties of infrared femtosecond laser-modified fused silica and application to waveguide fabrication," J. Opt. Soc. Am. B. 22(10), 21382143, 2005.
58. D. Blömer, A. Szameit, F. Dreisow, T. Schreiber, S. Nolte, A. Tünnermann, "Nonlinear refractive index of fs-laser-written waveguides in fused silica," Opt. Exp. 14, 2151-2157, 2006.
59. Szameit, J. Burghoff, T. Pertsch, S. Nolte, A. Tünnermann, and F. Lederer, "Two-dimensional solitons in cubic fs laser written waveguide arrays in fused silica," Opt. Express 14, 6055-6062, 2006.
60. Homoelle, S. Wielandy, A.L. Gaeta, N.F. Borrelli and C. Smith, "Infrared photosensitivity in silica glasses exposed to femtosecond laser pulses", Opt. Lett., Vol. 24, pp. 1311-1313, 1999.
61. E. Toratani, M. Kamata, and M. Obara, "Self-fabrication of void array in fused silica by femtosecond laser processing," Appl. Phys. Lett. 87, 171103, 2005.
62. Q. Sun, H. Jiang, Y. Liu, Y. Zhou, H. Yang, and Q. Gong, "Effect of spherical aberration on the propagation of a tightly focused femtosecond laser pulse inside fused silica," J. Opt. A: Pure Appl. Opt. 7, 655-659, 2005.
63. G. Matthaus, J. Burghoff, M. Will, S. Nolte, A. Tunnermann, "Thermal effects vs. gain in femtosecond laser written waveguides in neodymium doped fused silica," Appl. Phys. A. 83, 347-350, 2006.
64. A.Q. Wu, I.H. Chowdhury, X. Xu, "Plasma formation in fused silica induced by loosely focused femtosecond laser pulse," Appl. Phys. Lett. 88, 111502, 2006.
65. 2 crystals," Phys. Rev. B 73, 054105, 2006.
66. A. Zoubir, C. Rivero, R. Grodsky, K. Richardson, M. Richardson, T. Cardinal, M. Couzi, "Laser-induced defects in fused silica by femtosecond IR irradiation," Phys. Rev. B. 73, 224117, 2006.
67. G. Li, K.A. Winick, A.A. Said, M. Dugan, P. Bado, "Waveguide electro-optic modulator in fused silica fabricated by femtosecond laser direct writing and thermal poling," Opt. Lett. 31(6), 739-741, 2006.
68. N. T. Nguyen, A. Saliminia, W. Liu, S. L. Chin, R. Vallee, "Optical breakdown versus filamentation in fused silica by use of femtosecond infrared laser pulses," Opt. Lett., 28, 1591-1593, 2003.
69. Marcinkevièius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, "Femtosecond laser-assisted three-dimensional microfabrication in silica," Opt. Lett. 26, 277-279, 2001.
70. Y. Tokuda, M. Saito, M. Takahashi, K. Yamada, W. Watanabe, K. Itoh, and T. Yoko, "Waveguide formation in niobium tellurite glases by pico- and femtosecond laser pulses," J. Non-Crystal. Solids 326, 472-475, 2003.
71. G.C. Righini, I. Banyasz, S. Barneschi, M. Brenci,M. Cremona, D. Ehrt, M. Ferrari, R.M. Montereali, G.N.Conti, S.Pelli, S. Sebastiani and C.Tosello, Proc. SPIE 5840,649-657(2005).
72. P. Nandi, G. Jose, C. Jayakrishnan, S. Debbarma, K. Chalapathi, K. Alti, A. K. Dharmadhikari, J. A. Dharmadhikari, D. Mathur, "Femtosecond laser written channel waveguides in tellurite glass," Opt. Express 14, 12145-12150, 2006.
73. Y. Cheng, K. Sugioka, and K. Midorikawa, "Freestanding optical fibers fabricated in a glass chip using femtosecond laser micromachining for lab-on-a-chip application," Opt. Express 13, 7225-7232, 2005.
74. M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, "3-D microstructuring inside photosensitive glass by femtosecond laser excitation," Appl. Phys. A76, 857-860, 2003.
75. Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, K. Shihoyama, "Control of the cross-sectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser," Opt. Lett. 28, 55-57, 2003.
76. Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, "Three dimensional microoptical components embedded in photosensitive glass by a femtosecond laser," Opt. Lett. 28, 1144-1146, 2003
77. K. Sugioka, M. Masuda, T. Hongo, Y. Cheng, K. Shihoyama, K. Midorikawa, "Three-dimensional microfluidic structure embedded in photostructurable glass by femtosecond laser for lab-on-chip application," Appl. Phys. A79, 815-817, 2004.
78. Y. Cheng, K. Sugioka, and K. Midorikawa, "Microfluidic laser embedded in glass by three-dimensional femtosecond laser microprocessing," Opt. Lett. 29, 2007, 2004.
79. Y. Cheng, K. Sugioka, M. Masuda, K. Shihoyama, K. Toyoda, and K. Midorikawa, "Optical gratings embedded in photosensitive glass by photochemical reaction using a femtosecond laser," Opt. Express 11, 1809, 2003.
80. T. Hongo, K. Sugioka, H. Niino, Y. Cheng, M. Masuda, J. Miyamoto, H. Takai, and K. Midorikawa, "Three dimensional micromachining of glass using femtosecond laser for lab- a-chip device manufacture," J. Appl. Phys. 97, 063517, 2005
81. Z. L. Li, D. K. Y. Low, M. K. Ho, G. C. Lim, and K. J. Moh, "Fabrication of waveguides in Foturan by femtosecond laser," J. Laser Appl. 18, 320, 2006.
82. S. Ho, P. R. Herman, Y. Cheng, K. Sugioka, and K. Midorikawa, "Direct ultrafast laser writing of buried waveguides in Foturan glass," in Conference on Lasers and Electro-Optics (CLEO), Vol. 97 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2004), paper CThD6.
83. Q.-Z Zhao, J.-R. Qiu, X.-W. Jiang, C.-J. Zhao, C.-S. Zhu, "Controllable precipitation and dissolution of silver nanoparticles in ultrafast laser pulses irradiated Ag+-doped phosphate glass" Opt. Express,12, 4035, 2004.
84. V.R. Bhardwaj, E. Simova, P.B. Corkum, D.M. Rayner, C. Hnatovsky, R.S. Taylor, B. Schreder, M. Kluge, J. Zimmer, "Femtosecond laser-induced refractive index modification in multicomponent glasses," J. Appl. Phys. 97, 083102, 2005.
85. Z. Wang, K. Sugioka, K. Midorikawa, "Three-dimensional integration of microoptical components buried inside photosensitive glass by femtosecond laser direct writing", Appl. Phys. A. 89, 955-959, 2007.
86. Ye, Y. Bing-Kun, L. Bo, Q. Jian-Rong, Y. Xiao-Na, J. Xiong-Wei, and Z. Cong-Shan, "Thermal Stress-Induced Birefringence in Borate Glass Irradiated by Femtosecond Laser Pulses," Chin. Phys. Lett. 22, 2626-2629, 2005.
87. Yu, B. Chen, B. Lu, X. Yan, J. Qiu, C. Zhu, X. Jinag, "Microstructure of the crystals generated in borate glass irradiated by femtosecond pulses," Proc. SPIE 6171, 61710G1-61710G15, 2006.
88. O.M. Efimov, L.B. Glebov, K.A. Richardson, E. van Stryland, T. Cardinal, S.H. Park, M. Couzi, J.L. Bruneel, "Waveguide writing in chalcogenide glasses by a train of femtosecond laser pulses", Opt. Mater., 17, 379-386, 2001.
89. Y. Sikorski, A.A. Said, P. Bado, R. Maynard, C. Florea and K.A. Winick, "Optical waveguide amplifier in Nd-doped glass written with near IR femtosecond laser pulses", Electron. Lett., 36, 226-227, 2000.
90. O.M. Efimov, L.B. Glebov, K.A. Richardson, E. Van Stryland, T. Cardinal, S.H. Park, M. Couzi and J.L. Brunéel, "Waveguide writing in chalcogenide glasses by a train of femtosecond laser pulses," Opt. Mat. 17, 379-386, 2001.
91. M. Hughes, W. Yang and D. Hewak, "Fabrication and characterization of femtosecond laser written waveguides in chalcogenide glass," Appl. Phys. Lett. 90, 131113 (2007).
92. Y. Shimotsuma, P.G. Kazansky, J. Qiu, "Self-Organized Nanogratings in Glass Irradiated by Ultrashort Light Pulses," Phys. Rev. Lett. 91, 247405, 2003.
93. S. K. Sundaram, C. B. Schaffer, and E. Mazur, "Microexplosions in tellurite glasses," Appl. Phys. A 76, 379-384 (2003).