Ultrafast laser processing for lab-on-a-chip device manufacture

Materials Research Society Symposium Proceedings

Volumn 850, Issue , 2005, Pages 97-108

  Sugioka, Koji ^a   Cheng, Ya ^a   Midorikawa, Katsumi ^a  

^a INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

GLASS; HEAT TREATMENT; METALLIZING; MICROOPTICS; MICROSTRUCTURE; PHOTOSENSITIVITY; ULTRAFAST PHENOMENA;

LAB-ON-A-CHIP DEVICE MANUFACTURE; MICROCOMPONENTS; REACTANTS; ULTRAFAST LASER PROCESSING;

MICROPROCESSOR CHIPS;

EID: 23844488465     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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