Mechanical calibration of MEMS spring with 0.1-μN force resolution

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 227-230

  Miyamoto, Kenji ^a   Jomori, Tomoya ^a   Sugano, Koji ^a   Tabata, Osamu ^a   Tsuchiya, Toshiyuki ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; COMPOSITE MICROMECHANICS; ELECTROMAGNETISM; FLEXIBLE STRUCTURES; FORCE MEASUREMENT; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; NONMETALS; OPTICAL DESIGN; REACTIVE ION ETCHING; SILICON; SILICON WAFERS; SINGLE CRYSTALS;

DIRECT CALIBRATION; ELECTRO-MAGNETIC FORCES; FORCE RESOLUTION; INTERNATIONAL CONFERENCES; MEASUREMENT TOOLS; MECHANICAL FORCES; MICRO-ELECTRO MECHANICAL SYSTEMS; SILICON-ON-INSULATOR WAFERS; SINGLE-CRYSTAL-SILICON; SPRING CONSTANTS; TWO TYPES;

SPRINGS (COMPONENTS);

EID: 40949098474     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. V. N. Popov, Mat. Sci. Engineering R43 (2004), 60-102.
2. Y. Isono, et al., Proc. MEMS 2006, 883-886.
3. T. Tsuchiya, et al., Sensors and Actuators A 97-98 (2001), 214-228.