Mechanical characteristics of FIB deposited carbon nanowire by Electrostatic Actuated nano Tensile Testing Devices (EANAT)

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 883-886

  Isono, Yoshitada ^a   Kiuchi, Mario ^a   Sugiyama, Susumu ^a   Morita, Takahiko ^b,c   Matsui, Sinji ^b,c  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b UNIVERSITY OF HYOGO   (Japan)

^c JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CARBON; CHEMICAL VAPOR DEPOSITION; DEPOSITION; DIAMOND FILMS; ELECTROSTATICS; ION BEAMS; TENSILE STRENGTH; TENSILE TESTING;

CARBON FILMS; CARBON NANOWIRES; CARBON STRUCTURES; FOCUSED ION BEAMS;

NANOSTRUCTURED MATERIALS;

EID: 26844485531     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

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