-
1
-
-
0036860831
-
-
PSTEEU 0963-0252 10.1088/0963-0252/11/4/304.
-
E. Stoffels, A. J. Flikweert, W. W. Stoffels, and G. M. W. Kroesen, Plasma Sources Sci. Technol. PSTEEU 0963-0252 10.1088/0963-0252/11/4/304 11, 383 (2002).
-
(2002)
Plasma Sources Sci. Technol.
, vol.11
, pp. 383
-
-
Stoffels, E.1
Flikweert, A.J.2
Stoffels, W.W.3
Kroesen, G.M.W.4
-
2
-
-
36949035786
-
-
CPPHEP 0863-1042 10.1002/ctp200710066.
-
V. Schulz-von der Gathen, V. Buck, T. Gans, N. Knake, K. Niemi, S. Reuter, L. Schaper, and J. Winter, Contrib. Plasma Phys. CPPHEP 0863-1042 10.1002/ctpp.200710066 47, 510 (2007).
-
(2007)
Contrib. Plasma Phys.
, vol.47
, pp. 510
-
-
Schulz-Von Der Gathen, V.1
Buck, V.2
Gans, T.3
Knake, N.4
Niemi, K.5
Reuter, S.6
Schaper, L.7
Winter, J.8
-
3
-
-
33845962247
-
-
APPLAB 0003-6951 10.1063/1.2423233.
-
J. Benedikt, K. Focke, A. Yanguas-Gil, and A. von Keudell, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.2423233 89, 251504 (2006).
-
(2006)
Appl. Phys. Lett.
, vol.89
, pp. 251504
-
-
Benedikt, J.1
Focke, K.2
Yanguas-Gil, A.3
Von Keudell, A.4
-
4
-
-
34548062338
-
-
PRLTAO 0031-9007 10.1103/PhysRevLett.99.075004.
-
F. Iza, J. K. Lee, and M. G. Kong, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.99.075004 99, 075004 (2007).
-
(2007)
Phys. Rev. Lett.
, vol.99
, pp. 075004
-
-
Iza, F.1
Lee, J.K.2
Kong, M.G.3
-
5
-
-
33645514477
-
-
JPAPBE 0022-3727 10.1088/0022-3727/39/8/021.
-
A. Rousseau and X. Aubert, J. Phys. D JPAPBE 0022-3727 10.1088/0022-3727/39/8/021 39, 1619 (2006).
-
(2006)
J. Phys. D
, vol.39
, pp. 1619
-
-
Rousseau, A.1
Aubert, X.2
-
6
-
-
14644396593
-
-
JPAPBE 0022-3727 10.1088/0022-3727/38/4/002.
-
J. Baars-Hibbe, P. Sichler, C. Schrader, N. Lucas, K.-H. Gericke, and S. Büttgenbach, J. Phys. D JPAPBE 0022-3727 10.1088/0022-3727/38/4/002 38, 510 (2005).
-
(2005)
J. Phys. D
, vol.38
, pp. 510
-
-
Baars-Hibbe, J.1
Sichler, P.2
Schrader, C.3
Lucas, N.4
Gericke, K.-H.5
Büttgenbach, S.6
-
7
-
-
0000680072
-
-
APPLAB 0003-6951 10.1063/1.1338971.
-
J. G. Eden, S.-J. Park, J. Chen, and C. Liu, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1338971 78, 419 (2001).
-
(2001)
Appl. Phys. Lett.
, vol.78
, pp. 419
-
-
Eden, J.G.1
Park, S.-J.2
Chen, J.3
Liu, C.4
-
10
-
-
0035943908
-
-
APPLAB 0003-6951 10.1063/1.1401791.
-
J. G. Eden, S.-J. Park, J. Chen, and C. Liu, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1401791 79, 2100 (2001).
-
(2001)
Appl. Phys. Lett.
, vol.79
, pp. 2100
-
-
Eden, J.G.1
Park, S.-J.2
Chen, J.3
Liu, C.4
-
11
-
-
0036773566
-
-
JMIYET 1057-7157 10.1109/JMEMS.2002.802907.
-
J. Chen, S.-J. Park, Z. Fan, J. G. Eden, and C. Liu, J. Microelectromech. Syst. JMIYET 1057-7157 10.1109/JMEMS.2002.802907 11, 536 (2002).
-
(2002)
J. Microelectromech. Syst.
, vol.11
, pp. 536
-
-
Chen, J.1
Park, S.-J.2
Fan, Z.3
Eden, J.G.4
Liu, C.5
-
12
-
-
0036249301
-
-
IJSQEN 1077-260X 10.1109/2944.991409.
-
S.-J. Park, J. Chen, C. J. Wagner, N. P. Ostrom, C. Liu, and J. G. Eden, IEEE J. Sel. Top. Quantum Electron. IJSQEN 1077-260X 10.1109/2944.991409 8, 139 (2002).
-
(2002)
IEEE J. Sel. Top. Quantum Electron.
, vol.8
, pp. 139
-
-
Park, S.-J.1
Chen, J.2
Wagner, C.J.3
Ostrom, N.P.4
Liu, C.5
Eden, J.G.6
-
13
-
-
1142304542
-
-
JAPIAU 0021-8979 10.1063/1.1636251.
-
M. J. Kushner, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1636251 95, 846 (2004).
-
(2004)
J. Appl. Phys.
, vol.95
, pp. 846
-
-
Kushner, M.J.1
-
15
-
-
33846113352
-
-
APPLAB 0003-6951 10.1063/1.2425044.
-
T. Gans, J. Schulze, D. O'Connell, U. Czarnetzki, R. Faulkner, A. R. Ellingboe, and M. M. Turner, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.2425044 89, 261502 (2006).
-
(2006)
Appl. Phys. Lett.
, vol.89
, pp. 261502
-
-
Gans, T.1
Schulze, J.2
O'Connell, D.3
Czarnetzki, U.4
Faulkner, R.5
Ellingboe, A.R.6
Turner, M.M.7
-
16
-
-
34047133300
-
-
PHPAEN 1070-664X 10.1063/1.2717889.
-
D. O'Connell, T. Gans, D. Vender, U. Czarnetzki, and R. Boswell, Phys. Plasmas PHPAEN 1070-664X 10.1063/1.2717889 14, 034505 (2007).
-
(2007)
Phys. Plasmas
, vol.14
, pp. 034505
-
-
O'Connell, D.1
Gans, T.2
Vender, D.3
Czarnetzki, U.4
Boswell, R.5
-
17
-
-
14644443524
-
-
PSTEEU 0963-0252 10.1088/0963-0252/14/1/007.
-
M. Abdel-Rahman, T. Gans, V. Schulz-von der Gathen, and H. F. Döbele, Plasma Sources Sci. Technol. PSTEEU 0963-0252 10.1088/0963-0252/14/ 1/007 14, 51 (2005).
-
(2005)
Plasma Sources Sci. Technol.
, vol.14
, pp. 51
-
-
Abdel-Rahman, M.1
Gans, T.2
Schulz-Von Der Gathen, V.3
Döbele, H.F.4
-
18
-
-
33750600944
-
-
PSTEEU 0963-0252 10.1088/0963-0252/15/4/006.
-
A. Sublet, C. Ding, J.-L. Dorier, Ch. Hollenstein, P. Fayet, and F. Coursimault, Plasma Sources Sci. Technol. PSTEEU 0963-0252 10.1088/0963-0252/15/ 4/006 15, 630 (2006).
-
(2006)
Plasma Sources Sci. Technol.
, vol.15
, pp. 630
-
-
Sublet, A.1
Ding, C.2
Dorier, J.-L.3
Hollenstein, Ch.4
Fayet, P.5
Coursimault, F.6
-
19
-
-
79956018469
-
-
APPLAB 0003-6951 10.1063/1.1427427.
-
L. Mangolini, K. Orlov, U. Kortshagen, J. Heberlein, and U. Kogelschatz, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1427427 80, 10 (2002).
-
(2002)
Appl. Phys. Lett.
, vol.80
, pp. 10
-
-
Mangolini, L.1
Orlov, K.2
Kortshagen, U.3
Heberlein, J.4
Kogelschatz, U.5
-
21
-
-
0037422652
-
-
JPAPBE 0022-3727 10.1088/0022-3727/36/1/306.
-
Yu. B. Golubovskii, V. A. Mairov, J. Behnke, and J. F. Behnke, J. Phys. D JPAPBE 0022-3727 10.1088/0022-3727/36/1/306 36, 39 (2003).
-
(2003)
J. Phys. D
, vol.36
, pp. 39
-
-
Golubovskii, Yu.B.1
Mairov, V.A.2
Behnke, J.3
Behnke, J.F.4
-
22
-
-
17944375683
-
-
APPLAB 0003-6951 10.1063/1.1880441.
-
S.-J. Park, K.-F. Chen, N. P. Ostrom, and J. G. Eden, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1880441 86, 111501 (2005).
-
(2005)
Appl. Phys. Lett.
, vol.86
, pp. 111501
-
-
Park, S.-J.1
Chen, K.-F.2
Ostrom, N.P.3
Eden, J.G.4
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