-
1
-
-
0032022902
-
-
Massines F, Rabehi A, Decomps P, Ben Gadri R, Ségur P and Mayoux C 1998 J. Appl. Phys. 83 2950-7
-
(1998)
J. Appl. Phys.
, vol.83
, pp. 2950-2957
-
-
Massines, F.1
Rabehi, A.2
Decomps, P.3
Ben Gadri, R.4
Ségur, P.5
Mayoux, C.6
-
2
-
-
4644316900
-
-
Massines F, Ségur P, Gherardi N, Khamphan C and Ricard A 2003 Surf. Coat. Technol. 174-175 8-14
-
(2003)
Surf. Coat. Technol.
, vol.174-175
, pp. 8-14
-
-
Massines, F.1
Ségur, P.2
Gherardi, N.3
Khamphan, C.4
Ricard, A.5
-
6
-
-
14644414580
-
-
US Patent #5,403,453
-
Roth J R, Tsai P P, Wadsworth L, Liu C and Spence P D 1995 US Patent #5,403,453
-
(1995)
-
-
Roth, J.R.1
Tsai, P.P.2
Wadsworth, L.3
Liu, C.4
Spence, P.D.5
-
7
-
-
14644441208
-
-
US Patent #5,414,324
-
Roth J R, Tsai P P, Liu C, Laroussi M and Spence P D 1995 US Patent #5,414,324
-
(1995)
-
-
Roth, J.R.1
Tsai, P.P.2
Liu, C.3
Laroussi, M.4
Spence, P.D.5
-
8
-
-
0001291062
-
-
Kelly-Wintenberg K, Hodge A, Montie T C, Deleanu L, Sherman D, Roth J R, Tsai P P and Wadsworth L 1999 J. Vac. Sci. Technol. 17 1539-44
-
(1999)
J. Vac. Sci. Technol.
, vol.17
, pp. 1539-1544
-
-
Kelly-Wintenberg, K.1
Hodge, A.2
Montie, T.C.3
Deleanu, L.4
Sherman, D.5
Roth, J.R.6
Tsai, P.P.7
Wadsworth, L.8
-
20
-
-
0042829255
-
-
Baars-Hibbe L, Sichler P, Schrader C, Geßner C, Gericke K-H and Büttgenbach S 2003 Surf. Coat. Technol. 174-175 519-23
-
(2003)
Surf. Coat. Technol.
, vol.174-175
, pp. 519-523
-
-
Baars-Hibbe, L.1
Sichler, P.2
Schrader, C.3
Geßner, C.4
Gericke, K.-H.5
Büttgenbach, S.6
-
21
-
-
18244428433
-
-
Korzec D, Finantu-Dinu E G, Dinu G L, Engemann J, Stefecka M and Kando M 2003 Surf. Coat. Technol. 174-175 503-8
-
(2003)
Surf. Coat. Technol.
, vol.174-175
, pp. 503-508
-
-
Korzec, D.1
Finantu-Dinu, E.G.2
Dinu, G.L.3
Engemann, J.4
Stefecka, M.5
Kando, M.6
-
22
-
-
1842582506
-
-
Baars-Hibbe L, Schrader C, Sichler P, Cordes T, Gericke K-H, Büttgenbach S and Draeger S 2004 Vacuum 73 327-32
-
(2004)
Vacuum
, vol.73
, pp. 327-332
-
-
Baars-Hibbe, L.1
Schrader, C.2
Sichler, P.3
Cordes, T.4
Gericke, K.-H.5
Büttgenbach, S.6
Draeger, S.7
-
25
-
-
0035395336
-
-
O'Brien J, Hughes P J, Brunet M, O'Neill B, Alderman J, Lane B, O'Riordan A and O'Driscoll C 2001 J. Micromech. Microeng. 11 353-8
-
(2001)
J. Micromech. Microeng.
, vol.11
, pp. 353-358
-
-
O'Brien, J.1
Hughes, P.J.2
Brunet, M.3
O'Neill, B.4
Alderman, J.5
Lane, B.6
O'Riordan, A.7
O'Driscoll, C.8
-
30
-
-
14644392583
-
-
Dissertation Darmstadt, ISBN 3-8322-0413-X
-
Hartherz P 2002 Dissertation Darmstadt, ISBN 3-8322-0413-X
-
(2002)
-
-
Hartherz, P.1
-
32
-
-
14644445949
-
-
Schrader C, Sichler P, Baars-Hibbe L, Gericke K-H, Büttgenbach S and Draeger S 2004 at press
-
Schrader C, Sichler P, Baars-Hibbe L, Gericke K-H, Büttgenbach S and Draeger S 2004 at press
-
-
-
-
34
-
-
0009097720
-
-
Heidelberg: Hüthig
-
Janzen G 1992 Plasmatechnik (Heidelberg: Hüthig) pp 40-3
-
(1992)
Plasmatechnik
, pp. 40-43
-
-
Janzen, G.1
-
35
-
-
2542484694
-
-
Sichler P, Büttgenbach S, Baars-Hibbe L, Schrader C and Gericke K-H 2004 Chemical Eng. J. Special Issue 7th Int. Conf. on Microreaction Technology vol 101 pp 465-8
-
(2004)
Chemical Eng. J. Special Issue 7th Int. Conf. on Microreaction Technology
, vol.101
, pp. 465-468
-
-
Sichler, P.1
Büttgenbach, S.2
Baars-Hibbe, L.3
Schrader, C.4
Gericke, K.-H.5
|