Silicon microdischarge devices having inverted pyramidal cathodes: Fabrication and performance of arrays

Applied Physics Letters

Volumn 78, Issue 4, 2001, Pages 419-421

  Park, S J ^a   Chen, J ^a   Liu, C ^a   Eden, J G ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000680072     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1338971     Document Type: Article

References (4)

1. J. W. Frame, D. J. Wheeler, T. A. DeTemple, and J. G. Eden, Appl. Phys. Lett. 71, 1165 (1997).
2. J. W. Frame and J. G. Eden, Electron. Lett. 34, 1529 (1998).
3. S.-J. Park, C. J. Wagner, C. M. Herring, and J. G. Eden, Appl. Phys. Lett. 77, 199 (2000).
4. W. Shui, R. H. Stark, and K. H. Schoenbach, IEEE Trans. Plasma Sci. 27, 16 (1999).