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Volumn 80, Issue 1-3, 2005, Pages 98-101

Analysis of the nano-structural properties of thin film silicon-carbon alloys

Author keywords

Amorphous silicon carbide; FTIR; GISAXS; Nano structure; Raman

Indexed keywords

CARBON; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGENATION; MIXTURES; SPUTTERING; THIN FILMS;

AMORPHOUS SILICON CARBIDE; FTIR; GISAXS; RAMAN;

AMORPHOUS SILICON;

EID: 25444460824 PISSN: 0042207X EISSN: None Source Type: Journal
DOI: 10.1016/j.vacuum.2005.07.046 Document Type: Conference Paper

Times cited : (9)

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