Residual stress in Si nanocrystals embedded in a SiO2 matrix

Applied Physics Letters

Volumn 89, Issue 5, 2006, Pages

  Arguirov, T ^b   Mchedlidze, T ^a   Kittler, M ^a   Rolver R ^c   Berghoff, B ^c   Forst M ^c   Spangenberg, B ^c  

^a IHP   (Germany)

^b BRANDENBURG UNIVERSITY OF TECHNOLOGY   (Germany)

^c RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSIVE STRESS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SCATTERING; RAPID THERMAL ANNEALING; RESIDUAL STRESSES; SILICA;

LASER ANNEALING; NANOCRYSTALS; RESIDUAL COMPRESSIVE STRESS;

NANOSTRUCTURED MATERIALS;

EID: 33748453942     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2260825     Document Type: Article

References (16)

1. Y. Rui, D. Chen, J. Xu, Y. Zhang, L. Yang, J. Mei, Z. Ma, Z. Cen, W. Li, L. Xu, X. Huang, and K. Chen, J. Appl. Phys. 98, 033532 (2005), and references therein.
2. J. Gonzalez-Hernandez and R. Tsu, Appl. Phys. Lett. 42, 90 (1983).
3. M. Zacharias and P. Streitenberger, Phys. Rev. B 62, 8391 (2000).
4. R. Rölver, M. Först, O. Winkler, B. Spangenberg, and H. Kurz, J. Vac. Sci. Technol. A 24, 141 (2006).
5. V. Domnich, Yu. Gogotsi, and S. Dub, Appl. Phys. Lett. 76, 2214 (2000).
6. R. Tsu, J. Gonzalez-Hemandez, S. S. Chao, S. C. Lee, and K. Tanaka, Appl. Phys. Lett. 40, 534 (1982).
7. Ch. Ossadnik, S. Veprek, and I. Gregora, Thin Solid Films 337, 148 (1999).
8. W. Cheng and S. Ren, Phys. Rev. B 65, 205305 (2002).
9. L. Khriachtchev, O. Kilpelã, S. Karirinne, J. Keränen, and T. Lepistö, Appl. Phys. Lett. 78, 323 (2001).
10. S. Kouteva-Arguirova, Tz. Arguirov, D. Wolfframm, and J. Reif, J. Appl. Phys. 94, 4946 (2003).
11. M. Lax, J. Appl. Phys. 48, 3919 (1977).
12. H. W. Lo and A. Compaan, J. Appl. Phys. 51, 1565 (1980).
13. M. Balkanski, R. F. Wallis, and E. Haro, Phys. Rev. B 28, 1928 (1983).
14. I. De Wolf, Semicond. Sci. Technol. 11, 139 (1996).
15. A. Kailer, Yu. Gogotsi, and K. Nickel. J. Appl. Phys. 81, 3057 (1997).
16. J. Hu, L. Merkle, C. Menomi, and I. Spain, Phys. Rev. B 34, 4679 (1986).