Effects of ratio of mixed gases on the surface roughness and nano-hardness of a-C:H films

Journal of the Korean Physical Society

Volumn 52, Issue SUPPL. 1, 2008, Pages

  Dai, Haiyang ^a   Jiang, Hui ^a   Zhan, Changyong ^a   Huang, Ningkang ^a  

^a SICHUAN UNIVERSITY   (China)

Author keywords

Hydrogenated amorphous carbon; Middle frequency unbalanced magnetron sputtering technique; sp3 sp2

Indexed keywords

EID: 40449087924     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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