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Volumn 8, Issue 2-5, 1999, Pages 527-531
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A correlation between the microstructure and optical properties of hydrogenated amorphous carbon films prepared by RF magnetron sputtering
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Author keywords
Amorphous hydrogenated carbon; RF sputtering
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Indexed keywords
ABSORPTION SPECTROSCOPY;
CHEMICAL BONDS;
ENERGY GAP;
GRAPHITE;
HYDROGENATION;
INFRARED SPECTROSCOPY;
MAGNETRON SPUTTERING;
MOLECULAR STRUCTURE;
REFRACTIVE INDEX;
HYDROGENATED AMORPHOUS CARBON;
AMORPHOUS FILMS;
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EID: 0032614955
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/s0925-9635(98)00404-x Document Type: Article |
Times cited : (36)
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References (9)
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