A cathodic arc enhanced middle-frequency magnetron sputter system for deposition of hard protective coatings

Nuclear Science and Techniques/Hewuli

Volumn 17, Issue 3, 2006, Pages 135-138

  Huang, Zhi Hong ^a   Yang, Bing ^a   Fan, Xiang Jun ^a   Fu, De Jun ^a  

^a WUHAN UNIVERSITY   (China)

Author keywords

Cathodic arc; Diamond like carbon; Middle frequency magnetron sputtering

Indexed keywords

EID: 33746816602     PISSN: 10018042     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1001-8042(06)60026-2     Document Type: Article

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