Characterization of pore structure in a nanoporous low-dielectric-constant thin film by neutron porosimetry and X-ray porosimetry

Langmuir

Volumn 20, Issue 16, 2004, Pages 6658-6667

  Hedden, Ronald C ^a,b   Lee, Hae Jeong ^a   Soles, Christopher L ^a   Bauer, Barry J ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

KELVIN EQUATIONS; PORE STRUCTURE; X-RAY POROSIMETRY; X-RAY REFLECTIVITY;

MATHEMATICAL MODELS; NEUTRONS; PERMITTIVITY; PORE SIZE; POROSIMETERS; SOLVENTS; THIN FILMS; TOLUENE;

NANOSTRUCTURED MATERIALS;

DIELECTRIC CONSTANT; MODELS; NEUTRONS; PORE SIZE; POROSIMETERS; SOLVENTS; THIN FILMS; TOLUENE;

EID: 4043095494     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la036334u     Document Type: Article

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