Fourth-generation plasma immersion ion implantation and deposition facility for hybrid surface modification layer fabrication

Review of Scientific Instruments

Volumn 79, Issue 2, 2008, Pages

  Wang, Langping ^a   Huang, Lei ^a   Xie, Zhiwen ^a   Wang, Xiaofeng ^a   Tang, Baoyin ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ION IMPLANTATION; LABORATORIES; MAGNETRON SPUTTERING; SHAFTS (MACHINE COMPONENTS); VACUUM;

DEPOSITION FACILITY; VACUUM ARC; VACUUM CHAMBERS;

PLASMAS;

EID: 40149090654     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2870088     Document Type: Article

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