Adhesion strength of TiN films synthesized on GCr15-bearing steel using plasma immersion ion implantation and deposition

Surface and Coatings Technology

Volumn 186, Issue 1-2 SPEC. ISS., 2004, Pages 153-156

  Tang, Baoyin ^a   Wang, Yuhang ^a   Wang, Langping ^a   Wang, Xiaofeng ^a   Liu, Hongxi ^a   Yu, Yonghao ^a   Sun, Tao ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Adhesion strength; Plasma immersion ion implantation and deposition; Scratch test; TiN

Indexed keywords

ADHESION; DEPOSITION; ELECTRIC POTENTIAL; ION IMPLANTATION; METALLIC FILMS; PLASMAS; STEEL; STRENGTH OF MATERIALS; SYNTHESIS (CHEMICAL);

ADHESION STRENGTH; BIAS VOLTAGE; INTERFACE LAYER; PLASMA IMMERSION ION IMPLANTATION AND DEPOSITION (PIIID);

TITANIUM NITRIDE;

PLASMA TREATMENT;

EID: 17744395704     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.04.050     Document Type: Article

References (11)

1. Voevodin A.A O'Neill J.P Zabinski J.S Surf. Coat. Technol. 116-119 1999 36
2. Wang D.Y Weng K.W Chang C.L Guo X.J Diamond Relat. Mater. 9 2000 831
3. Zeng Z.M Zhang T Tang B.Y Tian X.B Chu P.K Surf. Coat. Technol. 120/121 1999 659
4. Sugiyama K Hayashi K Sasaki J Nucl. Instrum. Methods B80/81 1993 1367
5. Randall N.X Favaro G Frankel C.H Surf. Coat. Technol. 134 2001 146
6. Guzman L Man B.Y Miotello A Thin Solid Films 420-421 2002 565
7. Conrad J.R Radtke J.L Dodd R.A Worzala F.F Tran N.C J. Appl. Phys. 62 1987 4591
8. Wang L.P Wang X.F Tang B.Y Gan K.Y Peng X.Y Rev. Sci. Instrum. 74 2003 2983
9. Brown I.G Anders A Anders S Yu K.M Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms 80/81 1993 1281
10. Wang L.P Tang B.Y Gan K.Y Tian X.B Chu P.K J. Vac. Sci. Technol., A, Vac. Surf. Films 19 2001 2851
11. Chu P.K Tang B.Y Chen Y.C Ko P.K Rev. Sci. Instrum. 68 4 1997 1866