DLC film fabrication on the inner surface of a cylinder by carbon ion implantation

IEEE Transactions on Plasma Science

Volumn 34, Issue 4 I, 2006, Pages 1116-1120

  Wang, Yuhang ^a   Wang, Langping ^a   Yu, Yonghao ^a   Mu, Kuifeng ^a   Wang, Xiaofeng ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Diamond like carbon (DLC) film; Inner surface modification; Plasma immersion ion implantation (PIII); Wear resistance

Indexed keywords

DEPOSITION; FABRICATION; GLOW DISCHARGES; ION IMPLANTATION; RAMAN SPECTROSCOPY; SURFACE TREATMENT; WEAR RESISTANCE;

FILM FABRICATION; INNER SURFACE MODIFICATION; PLASMA IMMERSION ION IMPLANTATION;

DIAMOND LIKE CARBON FILMS;

EID: 33747833109     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2006.877503     Document Type: Article

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