Batch treatment of industrial components using plasma immersion ion implantation and deposition

Surface and Coatings Technology

Volumn 201, Issue 15, 2007, Pages 6585-6588

  Wang, L P ^a   Wang, Y H ^a   Yu, Y H ^a   Liu, H X ^a   Wang, X F ^a   Tang, B Y ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Batch treatment; Industrial components; PIIID

Indexed keywords

ION IMPLANTATION; MACHINE COMPONENTS; PLASMA DEPOSITION;

BATCH TREATMENT; INDUSTRIAL COMPONENT; PLASMA IMMERSION ION IMPLANTATION AND DEPOSITION;

PLASMA APPLICATIONS;

ION IMPLANTATION; MACHINE COMPONENTS; PLASMA APPLICATIONS; PLASMA DEPOSITION;

EID: 33847400136     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.09.094     Document Type: Article

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