Molecular dynamics and experimental studies on deposition mechanisms of ion beam sputtering

Applied Surface Science

Volumn 254, Issue 11, 2008, Pages 3436-3441

  Fang, Te Hua ^a   Chang, Win Jin ^b   Lin, Chao Ming ^c   Lien, Wen Chieh ^a  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

^b KUN SHAN UNIVERSITY   (Taiwan)

^c WUFENG INSTITUTE OF TECHNOLOGY   (Taiwan)

Author keywords

Ionic beam sputtering; Molecular dynamics; Thin film deposition

Indexed keywords

GRAIN SIZE AND SHAPE; ION BEAMS; SPUTTERING; SUBSTRATES; SURFACE ROUGHNESS; THIN FILMS;

IONIC BEAM SPUTTERING (IBS); NICKEL NANOFILMS; SPUTTERING POWER; THIN FILM DEPOSITION;

MOLECULAR DYNAMICS;

EID: 39749116358     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.11.054     Document Type: Article

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