Current research topics and applications of gas cluster ion beam processes

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 242, Issue 1-2, 2006, Pages 143-145

  Yamada, Isao ^a   Toyoda, Noriaki ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

Cluster ion beam assisted deposition; Cluster ion beams; Lateral sputtering; Shallow implantation; Surface smoothing

Indexed keywords

MULTILAYERS; OPTICAL FILTERS; SEMICONDUCTOR DOPING; SEMICONDUCTOR MATERIALS; THIN FILMS;

CLUSTER ION BEAM ASSISTED DEPOSITION; CLUSTER ION BEAMS; LATERAL SPUTTERING; SHALLOW IMPLANTATION; SURFACE SMOOTHING;

ION BEAMS;

EID: 28544432811     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.08.111     Document Type: Conference Paper

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