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Volumn , Issue , 2005, Pages 355-356
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Movements and collisions of nanoparticles in two phase flow
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Author keywords
CMP; Tribology; Two phases flow; Wear
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Indexed keywords
CHEMICAL MECHANICAL POLISHING;
FLUID DYNAMICS;
SLURRIES;
TRIBOLOGY;
TWO PHASE FLOW;
WEAR OF MATERIALS;
ATOMIC SMOOTH SURFACES;
SOLID SURFACES;
WEAR;
NANOSTRUCTURED MATERIALS;
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EID: 33144483293
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1115/wtc2005-63442 Document Type: Conference Paper |
Times cited : (4)
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References (6)
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