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Volumn 252, Issue 16, 2006, Pages 5846-5854

Nano-deformation of a Ni-P coating surface after nanoparticle impacts

Author keywords

Hard disk driver; Nano deformation; Nanoparticle impact; Ni P coating

Indexed keywords

ABRASIVES; ATOMIC FORCE MICROSCOPY; CHEMICAL MECHANICAL POLISHING; COATINGS; COMPUTER HARDWARE; CRYSTALS; DEFORMATION; EROSION; MICROSCOPIC EXAMINATION; NANOSTRUCTURED MATERIALS; PHOSPHORUS; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY; WEAR OF MATERIALS;

EID: 33744518383     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.08.009     Document Type: Article
Times cited : (10)

References (15)
  • 4
    • 33744522859 scopus 로고    scopus 로고
    • US Patent 6,461,227 (2002) to Cabot microelectronics Co., Aurora, IL.
  • 5
    • 33744533694 scopus 로고    scopus 로고
    • US Patent 6,328,774 (2001) to Fujimi America Inc., Wilsonville, USA.
  • 9
    • 33744525663 scopus 로고    scopus 로고
    • Z.J. Mao, Macroscopic and microscopic modelling in chemical-mechanical polishing process, PhD Thesis, University of California, Berkeley, 2003.
  • 12
    • 85040875608 scopus 로고
    • Cambridge University Press, London
    • Johnson K.L. Contact Mechanics (1985), Cambridge University Press, London
    • (1985) Contact Mechanics
    • Johnson, K.L.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.