A comparative study of plasma parameters and gas phase compositions in Cl2 and HCl direct current glow discharges

Thin Solid Films

Volumn 516, Issue 10, 2008, Pages 3020-3027

  Efremov, A M ^a   Svettsov, V I ^a   Sitanov, D V ^a   Balashov, D I ^a  

^a IVANOVO STATE UNIVERSITY OF CHEMISTRY AND TECHNOLOGY   (Russian Federation)

Author keywords

Chlorine; Dissociation; Hydrogen; Ionization; Modeling; Plasma; Rate coefficient

Indexed keywords

CHLORINE; DISSOCIATION; HYDROCHLORIC ACID; IONIZATION; MOLECULAR MODELING; PHASE COMPOSITION; PLASMAS; RATE CONSTANTS;

GAS PHASE COMPOSITIONS; PLASMA PARAMETERS; RATE COEFFICIENT;

GLOW DISCHARGES;

EID: 39649085851     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.11.046     Document Type: Article

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