Effect of grid bias on deposition of nanocrystalline diamond films

Transactions of Nanjing University of Aeronautics and Astronautics

Volumn 24, Issue 4, 2007, Pages 317-322

  Xu, Feng ^a   Zuo, Dunwen ^a   Lu, Wenzhuang ^a   Wang, Min ^a  

^a NANJING UNIVERSITY OF AERONAUTICS AND ASTRONAUTICS   (China)

Author keywords

Grid bias voltage; Hot filament CVD; Nanocrystalline diamond film; Nucleation; Substrate bias voltage

Indexed keywords

BIAS VOLTAGE; DIAMOND FILMS; GROWTH (MATERIALS); MICROSTRUCTURE; NUCLEATION; PLASMA DENSITY; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; SURFACE MORPHOLOGY;

DIAMOND GRAIN SIZE; HOT FILAMENT; NANOCRYSTALLINE;

CHEMICAL VAPOR DEPOSITION;

EID: 39149106000     PISSN: 10051120     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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