Fem simulation on the 3D temperature distribution of large area hot filament chemical vapor deposition system

Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering

Volumn 43, Issue 6, 2007, Pages 21-25

  Xu, Feng ^a   Zuo, Dunwen ^a   Lu, Wenzhuang ^a   Li, Lei ^a   Wang, Min ^a  

^a NANJING UNIVERSITY OF AERONAUTICS AND ASTRONAUTICS   (China)

Author keywords

Diamond film; Finite element method; Hot filament chemical vapor deposition; Simulation; Temperature distribution

Indexed keywords

CHEMICAL ELEMENTS; CHEMICAL VAPOR DEPOSITION; ELECTRIC REACTORS; FINITE ELEMENT METHOD; HEAT RADIATION; HEAT RESISTANCE; TEMPERATURE DISTRIBUTION; THREE DIMENSIONAL;

FINITE ELEMENT ANALYSIS (FEA); HOT FILAMENT CHEMICAL VAPOR DEPOSITION; SIMULATION;

DIAMOND FILMS;

EID: 34447119757     PISSN: 05776686     EISSN: None     Source Type: Journal    
DOI: 10.3901/JME.2007.06.021     Document Type: Article

References (15)