Preparation of nanocrystalline diamond films on molybdenum substrate by double bias method

Key Engineering Materials

Volumn 315-316, Issue , 2006, Pages 646-650

  Xu, F ^a   Zuo, D W ^a   Lu, W Z ^a   Li, X F ^a   Xiang, B K ^a   Wang, M ^a  

^a NANJING UNIVERSITY OF AERONAUTICS AND ASTRONAUTICS   (China)

Author keywords

Double bias; Hot filament CVD; Molybdenum; Nanocrystalline diamond film

Indexed keywords

CHEMICAL VAPOR DEPOSITION; MOLYBDENUM; NANOSTRUCTURED MATERIALS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

DOUBLE BIAS; HOT FILAMENT CHEMICAL VAPOR DEPOSITED (HFCVD); NANOCRYSTALLINE DIAMOND FILMS; NUCLEATION DENSITY;

DIAMOND FILMS;

EID: 33745625650     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/0-87849-999-7.646     Document Type: Conference Paper

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