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Volumn 258-259, Issue , 2004, Pages 517-521

Some Key points for EACVD Thick Diamond Film Preparation

Author keywords

CVD diamond; Electron assisted CVD; Preparation; Thick film

Indexed keywords

CARBON; CHEMICAL VAPOR DEPOSITION; GRAPHITE; HEATING; HYDROCARBONS; MACHINING; TEMPERATURE DISTRIBUTION; THICK FILMS; DIAMONDS; SUBSTRATES;

EID: 1642279712     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: None     Document Type: Conference Paper
Times cited : (25)

References (6)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.