Comparison of ZrN and TiN formed by plasma based ion implantation & deposition

Surface and Coatings Technology

Volumn 202, Issue 11, 2008, Pages 2310-2313

  Heinrich, S ^a   Schirmer, S ^a   Hirsch, D ^a   Gerlach, J W ^a   Manova, D ^a   Assmann, W ^b   Mandl S ^a  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^b UNIVERSITY OF MUNICH   (Germany)

Author keywords

PIII; Texture; TiN; ZrN

Indexed keywords

FILMS; HARDNESS; ION IMPLANTATION; PLASMA DEPOSITION; SILICON; SUBSTRATES; TEXTURES; TITANIUM NITRIDE; ZIRCONIUM COMPOUNDS;

COLUMNAR FILMS; PULSE BIAS; SILICON SUBSTRATES;

COATINGS;

COATINGS; FILMS; HARDNESS; ION IMPLANTATION; PLASMA DEPOSITION; SILICON; SUBSTRATES; TEXTURES; TITANIUM NITRIDE; ZIRCONIUM COMPOUNDS;

EID: 38949166046     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.08.057     Document Type: Article

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