Ion energy and charge state distributions in zirconium nitride arc plasma

Applied Physics Letters

Volumn 83, Issue 8, 2003, Pages 1542-1544

  Chhowalla, Manish ^a  

^a RUTGERS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; IONS; PLASMAS;

CHARGE STATE DISTRIBUTIONS;

ZIRCONIUM COMPOUNDS;

EID: 0042281656     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1606107     Document Type: Article

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