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Surface and Coatings Technology

Volumn 142-144, Issue , 2001, Pages 418-423

Optical characterization of TiN produced by metal-plasma immersion ion implantation

(4) Huber, P a Manova, D a Mandl S a,c Rauschenbach, B a,b

a UNIVERSITY OF AUGSBURG (Germany)

b UNIVERSITY OF LEIPZIG (Germany)

c Institut für Oberflächenmodifizierung (Germany)

Author keywords

Arc evaporation; Electrical properties; Plasma immersion ion implantation; Spectroscopic ellipsometry; Titanium nitride

Indexed keywords

FLOW OF FLUIDS; ION IMPLANTATION; OPTICAL PROPERTIES; PLASMA APPLICATIONS; THIN FILMS; TITANIUM NITRIDE;

PULSE VOLTAGE;

COATING TECHNIQUES;

TITANIUM NITRIDE;

EID: 0035387736 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(01)01082-9 Document Type: Article

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