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Applied Surface Science

Volumn 134, Issue 1-4, 1998, Pages 1-10

Structure of nitride film hard coatings prepared by reactive magnetron sputtering

(6) Manaila, R a Biro, D b Devenyi, A a Fratiloiu, D a Popescu, R a Totolici, J E a

a NATIONAL INSTITUTE OF MATERIALS PHYSICS (Romania)

b Technical University 'P Maior' (Romania)

Author keywords

Reactive magnetron sputtering; TiN; ZrN

Indexed keywords

ALUMINUM COMPOUNDS; COMPOSITION EFFECTS; ELECTRON BEAMS; LATTICE CONSTANTS; MAGNETRON SPUTTERING; SOLID SOLUTIONS; SPUTTER DEPOSITION; TEXTURES; THERMAL EFFECTS; TITANIUM NITRIDE; X RAY CRYSTALLOGRAPHY; ZIRCONIUM COMPOUNDS;

TITANIUM ALUMINUM NITRIDE; ZIRCONIUM NITRIDE;

PROTECTIVE COATINGS;

EID: 0032163728 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(98)00258-X Document Type: Article

Times cited : (17)

References (25)

1
- 0025792680
- T. Ikeda, H. Satok, Thin Solid Films 195 (1991) 99.
- (1991) Thin Solid Films , vol.195 , pp. 99
- Ikeda, T.¹ Satok, H.²

2
- 0019633490
- M. Wittmer, J. Noser, H. Melchior, J. Appl. Phys. 52 (1981) 6659.
- (1981) J. Appl. Phys. , vol.52 , pp. 6659
- Wittmer, M.¹ Noser, J.² Melchior, H.³

3
- 13944274472
- D. McIntyre, J.E. Greene, G. Hakansson, J.E. Sundgren, W.D. Munz, J. Appl. Phys. 67 (1990) 1542.
- (1990) J. Appl. Phys. , vol.67 , pp. 1542
- McIntyre, D.¹ Greene, J.E.² Hakansson, G.³ Sundgren, J.E.⁴ Munz, W.D.⁵

4
- 0027589685
- Y. Tanaka, T.M. Gur, M. Kelly, S.B. Hagstrom, T. Ikeda, Thin Solid Films 228 (1993) 238.
- (1993) Thin Solid Films , vol.228 , pp. 238
- Tanaka, Y.¹ Gur, T.M.² Kelly, M.³ Hagstrom, S.B.⁴ Ikeda, T.⁵

5
- 0022102577
- S. Veprek, Thin Solid Films 130 (1985) 135.
- (1985) Thin Solid Films , vol.130 , pp. 135
- Veprek, S.¹

6
- 85061690705
- 0.9 (31-1403); ZrN (35-753)
- 0.9 (31-1403); ZrN (35-753).

7
- 0029633289
- R. Manaila, D. Biro, P.B. Barna, M. Adamik, F. Zavaliche, S. Craciun, A. Devenyi, Appl. Surf. Sci. 91 (1995) 295.
- (1995) Appl. Surf. Sci. , vol.91 , pp. 295
- Manaila, R.¹ Biro, D.² Barna, P.B.³ Adamik, M.⁴ Zavaliche, F.⁵ Craciun, S.⁶ Devenyi, A.⁷

8
- 0024620131
- A.J. Perry, Thin Solid Films 170 (1989) 63.
- (1989) Thin Solid Films , vol.170 , pp. 63
- Perry, A.J.¹

9
- 0027589601
- P. Panjan, B. Navinsek, A. Zabkar, V. Marinkovic, Dj. Mandrino, J. Fiser, Thin Solid Films 228 (1993) 233.
- (1993) Thin Solid Films , vol.228 , pp. 233
- Panjan, P.¹ Navinsek, B.² Zabkar, A.³ Marinkovic, V.⁴ Mandrino, Dj.⁵ Fiser, J.⁶

10
- 0024128094
- R.Y. Fillit, A.J. Perry, Surf. Coat. Technol. 36 (1988) 647.
- (1988) Surf. Coat. Technol. , vol.36 , pp. 647
- Fillit, R.Y.¹ Perry, A.J.²

11
- 0002545416
- S. Nagakura, T. Kusuaski, F. Kaminoto, Y. Hirotsu, J. Appl. Cryst. 8 (1975) 65.
- (1975) J. Appl. Cryst. , vol.8 , pp. 65
- Nagakura, S.¹ Kusuaski, T.² Kaminoto, F.³ Hirotsu, Y.⁴

12
- 0028464854
- R. Kuzel Jr., R. Cerny, V. Valvoda, M. Blomberg, M. Merisalo, Thin Solid Films 247 (1994) 64.
- (1994) Thin Solid Films , vol.247 , pp. 64
- Kuzel R., Jr.¹ Cerny, R.² Valvoda, V.³ Blomberg, M.⁴ Merisalo, M.⁵

13
- 0028438482
- R. Cerny, R. Kuzel, V. Valvoda, S. Kadlec, J. Musil, Surf. Coat. Technol. 64 (1994) 111.
- (1994) Surf. Coat. Technol. , vol.64 , pp. 111
- Cerny, R.¹ Kuzel, R.² Valvoda, V.³ Kadlec, S.⁴ Musil, J.⁵

14
- 0025664315
- R. Cerny, R. Kuzel, V. Valvoda, S. Kadlec, J. Musil, D. Rafaja, A.J. Perry, Thin Solid Films 193/194 (1990) 401.
- (1990) Thin Solid Films , vol.193-194 , pp. 401
- Cerny, R.¹ Kuzel, R.² Valvoda, V.³ Kadlec, S.⁴ Musil, J.⁵ Rafaja, D.⁶ Perry, A.J.⁷

15
- 0029404266
- R. Cerny, R. Kuzel, V. Valvoda, M. Blomberg, M. Merisalo, Thin Solid Films 268 (1995) 72.
- (1995) Thin Solid Films , vol.268 , pp. 72
- Cerny, R.¹ Kuzel, R.² Valvoda, V.³ Blomberg, M.⁴ Merisalo, M.⁵

16
- 0026899261
- D. Maheo, J.M. Poitevin, Thin Solid Films 215 (1992) 8.
- (1992) Thin Solid Films , vol.215 , pp. 8
- Maheo, D.¹ Poitevin, J.M.²

17
- 84903634963
- Y. Tanaka, T.M. Gur, M. Kelly, S.B. Hagstrom, T. Ikeda, K. Wakihira, H. Satoh, J. Vac. Sci. Technol. A 10 (1992) 1749.
- (1992) J. Vac. Sci. Technol. A , vol.10 , pp. 1749
- Tanaka, Y.¹ Gur, T.M.² Kelly, M.³ Hagstrom, S.B.⁴ Ikeda, T.⁵ Wakihira, K.⁶ Satoh, H.⁷

18
- 0001799516
- U. Wahlström, L. Hultman, J.E. Sundgren, F. Adibi, J. Petrov, J.E. Greene, Thin Solid Films 235 (1993) 62.
- (1993) Thin Solid Films , vol.235 , pp. 62
- Wahlström, U.¹ Hultman, L.² Sundgren, J.E.³ Adibi, F.⁴ Petrov, J.⁵ Greene, J.E.⁶

19
- 0026393609
- L. Hultman, G. Hakansson, U. Wahlström, J.E. Sundgren, J. Petrov, F. Adibi, J.E. Greene, Thin Solid Films 205 (1991) 153.
- (1991) Thin Solid Films , vol.205 , pp. 153
- Hultman, L.¹ Hakansson, G.² Wahlström, U.³ Sundgren, J.E.⁴ Petrov, J.⁵ Adibi, F.⁶ Greene, J.E.⁷

20
- 0023438628
- G. Hakansson, J.E. Sundgren, D. McIntyre, J.E. Greene, W.D. Münz, Thin Solid Films 153 (1987) 55.
- (1987) Thin Solid Films , vol.153 , pp. 55
- Hakansson, G.¹ Sundgren, J.E.² McIntyre, D.³ Greene, J.E.⁴ Münz, W.D.⁵

21
- 0031556912
- J.P. Zhao, X. Wang, Z.Y. Chen, Q. Yang, T.S. Shi, X.H. Liu, J. Phys. D: Appl. Phys. 30 (1997) 5.
- (1997) J. Phys. D: Appl. Phys. , vol.30 , pp. 5
- Zhao, J.P.¹ Wang, X.² Chen, Z.Y.³ Yang, Q.⁴ Shi, T.S.⁵ Liu, X.H.⁶

22
- 0000006330
- M. Itoh, M. Hori, S. Nadahara, J. Vac. Sci. Technol. B 9 (1991) 149.
- (1991) J. Vac. Sci. Technol. B , vol.9 , pp. 149
- Itoh, M.¹ Hori, M.² Nadahara, S.³

23
- 0001182638
- S.H. Lee, B.-J. Kim, H.-J. Kim, J.-J. Lee, J. Appl. Phys. 80 (1996) 1469.
- (1996) J. Appl. Phys. , vol.80 , pp. 1469
- Lee, S.H.¹ Kim, B.-J.² Kim, H.-J.³ Lee, J.-J.⁴

24
- 0042660368
- E.O. Ristolainen, J.M. Molarius, A.S. Korhonen, V.K. Lindroos, J. Vac. Sci. Technol. A 5 (1987) 2184.
- (1987) J. Vac. Sci. Technol. A , vol.5 , pp. 2184
- Ristolainen, E.O.¹ Molarius, J.M.² Korhonen, A.S.³ Lindroos, V.K.⁴

25
- 0021411590
- B.O. Johansson, J.-E. Sundgren, V. Helmersson, M.K. Hibbs, Appl. Phys. Lett. 44 (1984) 670.
- (1984) Appl. Phys. Lett. , vol.44 , pp. 670
- Johansson, B.O.¹ Sundgren, J.-E.² Helmersson, V.³ Hibbs, M.K.⁴

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