SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 200, Issue 1-4 SPEC. ISS., 2005, Pages 589-593

Two-dimensional texture and sheath evolution in metal plasma immersion ion implantation

(4) Mändl, Stephan a Thorwarth, G b Stritzker, B b Rauschenbach, B a

a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM (Germany)

b UNIVERSITY OF AUGSBURG (Germany)

Author keywords

Homogeneity; MePIIID; Texture; TiN; XRD

Indexed keywords

CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; DEPOSITION; ELECTRIC POTENTIAL; ION IMPLANTATION; PLASMA APPLICATIONS; PLASMA SHEATHS; TEXTURES; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

CRYSTALLITES; METAL PLASMA IMMERSION ION IMPLANTATION; SHEATH EVOLUTION;

TITANIUM NITRIDE;

ION IMPLANTATION;

EID: 24644440061 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.01.115 Document Type: Article

Times cited : (8)

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