Ion orbits in plasma etching of semiconductors

Physics of Plasmas

Volumn 15, Issue 1, 2008, Pages

  Madziwa Nussinov, Tsitsi G ^a   Arnush, Donald ^a   Chen, Francis F ^a  

^a Engineering IV   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELDS; PHOTORESISTS; PLASMA SHEATHS; SEMICONDUCTOR MATERIALS;

ELECTRON SHADING; ION ORBITS; SHEATH ACCELERATED IONS; THIN OXIDE LAYERS;

PLASMA ETCHING;

EID: 38849194629     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2819681     Document Type: Article

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