Diagnostics of surface wave excited Kr/O2 plasma for low-temperature oxidation processes

Journal of Applied Physics

Volumn 102, Issue 1, 2007, Pages

  Takeda, Keigo ^a   Kubota, Yoshiki ^a   Takashima, Seigo ^a   Hori, Masaru ^a   Serdyuchenko, Anna ^b   Ito, Masafumi ^c   Matsumi, Yutaka ^a  

^a NAGOYA UNIVERSITY   (Japan)

^b RUHR UNIVERSITY BOCHUM   (Germany)

^c WAKAYAMA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DILUTION; GROUND STATE; LANGMUIR BLODGETT FILMS; LIGHT ABSORPTION; THERMOOXIDATION; ULTRAVIOLET RADIATION;

DILUTION RATIO; OXYGEN ATOMS; ULTRAVIOLET ABSORPTION;

PLASMA WAVES;

EID: 34547344325     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2752549     Document Type: Article

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