Adsorption and reaction of SiH4 and oxygen on Pd(1 1 1)

Surface Science

Volumn 602, Issue 3, 2008, Pages 786-794

  Kershner, Dylan C ^a   Medlin, J Will ^a  

^a University of Colorado at Boulder   (United States)

Author keywords

Metal insulator interface; Oxidation; Palladium; Silane; Silica; Silicide

Indexed keywords

ADSORPTION; OXYGEN; PALLADIUM; REACTION KINETICS; SILICA;

COADSORPTION; HIGH TEMPERATURE ANNEALING; METAL-INSULATOR INTERFACE;

SILICIDES;

EID: 38749118201     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2007.12.006     Document Type: Article

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