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Materials Science and Engineering: A

Volumn 475, Issue 1-2, 2008, Pages 319-326

Microstructural study of annealed gold-silicon thin films under nanoindentation

(2) Lee, Woei Shyan a Fong, Fang Jui a

a NATIONAL CHENG KUNG UNIVERSITY (Taiwan)

Author keywords

Amorphisation; Annealing; Au Si thin films; Eutectic phase; Nanoindentation

Indexed keywords

AMORPHIZATION; ANNEALING; COMPOSITE STRUCTURES; GOLD; MECHANICAL PROPERTIES; MICROSTRUCTURAL EVOLUTION; NANOINDENTATION; SILICON; SINGLE CRYSTALS; TEMPERATURE; TRANSMISSION ELECTRON MICROSCOPY;

EUTECTIC PHASE; GOLD-SILICON THIN FILMS;

THIN FILMS;

AMORPHIZATION; ANNEALING; COMPOSITE STRUCTURES; GOLD; MECHANICAL PROPERTIES; MICROSTRUCTURAL EVOLUTION; NANOINDENTATION; SILICON; SINGLE CRYSTALS; TEMPERATURE; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

EID: 38749083454 PISSN: 09215093 EISSN: None Source Type: Journal
DOI: 10.1016/j.msea.2007.04.083 Document Type: Article

Times cited : (10)

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