Transmission electron microscopy of amorphization and phase transformation beneath indents in Si

Philosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties

Volumn 82, Issue 10, 2002, Pages 1971-1981

  Saka, H ^a   Shimatani, A ^a   Suganuma, M ^b   Suprijadi, ^c  

^a NAGOYA UNIVERSITY   (Japan)

^b Aichi Industrial Research Institute   (Japan)

^c BANDUNG INSTITUTE OF TECHNOLOGY   (Indonesia)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; CRACKS; DEFORMATION; DISLOCATIONS (CRYSTALS); MICROSTRUCTURE; PHASE TRANSITIONS; POINT DEFECTS; TRANSMISSION ELECTRON MICROSCOPY;

DEFORMATION STRUCTURE; FOCUSED ION BEAM TECHNIQUE; MICROSTRUCTURE BENEATH INDENTS;

SEMICONDUCTING SILICON;

EID: 0037055283     PISSN: 01418610     EISSN: None     Source Type: Journal    
DOI: 10.1080/01418610208235709     Document Type: Article

References (21)

1. Bradby, J. E., Williams, J. S., Wong-Leung, J., Swain, M. V., and Munroe, P., 2000, Appl. Phys. Lett., 23, 3749.
2. Bradby, J. E., Williams, J. S., Wong-Leung, J., Swain, M. V., and Munroe, P., 2001, J. Mater. Set., 16, 1500.
3. Clark, D. R., Kroll, M. C., Kirchner, P. D., Cook, R. F., and Hockley, B. J., 1988, Phys. Rev. Lett., 60, 2156.
4. Gallaham, D. L., and Morris, J. C., 1992, J. Mater. Res., 7, 1614.
5. Hill, M. J., and Rowcliff, D. J., 1974, J. Mater. Sci., 9, 1569.
6. Hu, J. Z., and Spain, I. L., 1984, Solid St. Commun., 51, 263.
7. Hu, J. Z., Merkle, L. D., Menoni, C. S., and Spain, I. L., 1986, Phys. Rev. B, 34, 4679.
8. Kailer, A., Gogotsi, Y. G., and Nickel, L. G., 1997, J. appl. Phys., 81, 3057.
9. Lawn, B., and Wilshaw, R., 1975, J. Mater. Sci., 10, 1049.
10. Mann, A. B., van Herden, D., Pethica, J. B., and Weihs, T. P., 2000, J. Mater. Res., 15, 1754.
11. Moon, W.-J., and Saka, H., 2000, Phil. Mag. Lett., 80, 461.
12. Page, T. F., Oliver, W. C., and McHargue, C. J., 1992, J. Mater. Res., 7, 450.
13. Pharr, G. M., Oliver, W. C., and Clarke, D. R., 1990, J. electron. Mater., 19, 881.
14. Saka, H., 1998, J. vac. Sci. Technol. B, 16, 2522.
15. Saka, H., and Abe, S., 1997, J. Electron Microsc., 1, 45.
16. Saka, H., and Nagaya, G., 1995, Phil. Mag. Lett., 72, 251.
17. Shimatani, A., Nango, T., Suprijadi, and Saka, H., 1998, Mater. Res. Symp. Proc., 522, 71.
18. Suprijadi, and Saka, H., 1998, Phil. Mag. Lett., 78, 435.
19. Tachi, M., Suprijadi, Arai, S., and Saka, H., 2002, Phil. Mag. Lett., 82, 133.
20. Weppelmann, E. R., Field, J. S., and Swain, M. V., 1993, J. Mater. Res., 8, 830.
21. Young, R. J., Kirk, E. C. G., Williams, D. A., and Ahmed, H., 1990, Mater. Res. Soc. Symp. Proc., 199, 205.