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Volumn 506, Issue 3, 2002, Pages 305-312

Eutectic reaction of gold thin-films deposited on silicon surface

Author keywords

Alloys; Crystallization; Field ion microscopy; Gold; Metal semiconductor interfaces; Silicides; Silicon

Indexed keywords

CRYSTAL ATOMIC STRUCTURE; CRYSTALLINE MATERIALS; CRYSTALLIZATION; EUTECTICS; GOLD; HEAT TREATMENT; HIGH TEMPERATURE EFFECTS; ION MICROSCOPES; SILICON; THIN FILMS;

EID: 0036570424     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(02)01429-2     Document Type: Article
Times cited : (31)

References (18)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.