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Volumn 506, Issue 3, 2002, Pages 305-312
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Eutectic reaction of gold thin-films deposited on silicon surface
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Author keywords
Alloys; Crystallization; Field ion microscopy; Gold; Metal semiconductor interfaces; Silicides; Silicon
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Indexed keywords
CRYSTAL ATOMIC STRUCTURE;
CRYSTALLINE MATERIALS;
CRYSTALLIZATION;
EUTECTICS;
GOLD;
HEAT TREATMENT;
HIGH TEMPERATURE EFFECTS;
ION MICROSCOPES;
SILICON;
THIN FILMS;
FIELD-ION MICROSCOPY (FIM);
SURFACE REACTIONS;
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EID: 0036570424
PISSN: 00396028
EISSN: None
Source Type: Journal
DOI: 10.1016/S0039-6028(02)01429-2 Document Type: Article |
Times cited : (31)
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References (18)
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