Effect of native oxides on the elasticity of a silicon nano-scale beam

Solid State Communications

Volumn 145, Issue 7-8, 2008, Pages 351-354

  Wang, Jing ^a   Huang, Qing An ^a   Yu, Hong ^a  

^a BEIJING UNIVERSITY OF POSTS AND TELECOMMUNICATIONS   (China)

Author keywords

A. Nano structures; A. Semiconductors; D. Elasticity

Indexed keywords

ELASTIC MODULI; ELASTICITY; SILICON; THICKNESS MEASUREMENT;

BULK VALUE; NANO-SCALE BEAM; SEMI-CONTINUUM METHOD;

OXIDES;

EID: 38349188620     PISSN: 00381098     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ssc.2007.12.002     Document Type: Article

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