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Journal of Materials Science

Volumn 43, Issue 3, 2008, Pages 1114-1120

Photoacoustic measurement of thermal properties of TiN thin films

(6) Albert Irudayaraj, A a Srinivasan, R b Kuppusami, P c Mohandas, E c Kalainathan, S d Ramachandran, K e

a SACRED HEART COLLEGE (India)

b THIAGARAJAR COLLEGE (India)

c INDIRA GANDHI CENTRE FOR ATOMIC RESEARCH (India)

d VIT UNIVERSITY (India)

e MADURAI KAMARAJ UNIVERSITY (India)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETRON SPUTTERING; MICROSTRUCTURE; NITROGEN; PHOTOACOUSTIC EFFECT; THERMODYNAMIC PROPERTIES; TITANIUM NITRIDE;

PHOTOACOUSTIC MEASUREMENT; SUBSTRATE TEMPERATURE;

THIN FILMS;

EID: 38349048612 PISSN: 00222461 EISSN: 15734803 Source Type: Journal
DOI: 10.1007/s10853-007-2248-8 Document Type: Article

Times cited : (22)

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