Solidly mounted thin film electro-acoustic resonator utilizing a conductive Bragg reflector

Sensors and Actuators, A: Physical

Volumn 141, Issue 2, 2008, Pages 598-602

  Enlund, Johannes ^a   Martin, David ^a   Yantchev, Ventsislav ^a   Katardjiev, Ilia ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

AlN; Bragg reflector; Equivalent circuit; Micromachined acoustic resonator

Indexed keywords

BRAGG REFLECTORS; ELECTRIC CONDUCTIVITY; ELECTRODES; EQUIVALENT CIRCUITS; PIEZOELECTRIC DEVICES; THIN FILMS;

CONDUCTIVE BRAGG REFLECTORS; MICROMACHINED ACOUSTIC RESONATORS; SOLIDLY MOUNTED RESONATORS (SMR);

ACOUSTIC RESONATORS;

EID: 38149017727     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.09.002     Document Type: Article

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