Modified BVD-equivalent circuit of FBAR by taking electrodes into account

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2002, Pages 973-976

  Chao, Min Chiang ^a   Huang, Zi Neng ^a   Pao, Shih Yung ^a   Wang, Z ^a   Lam, C S ^a  

^a TXC CORPORATION   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE; CAPACITANCE; CAPACITORS; COMPUTER SIMULATION; ELECTRIC IMPEDANCE; ELECTRIC INDUCTORS; ELECTRODES; EQUIVALENT CIRCUITS; MATHEMATICAL MODELS; NATURAL FREQUENCIES; PIEZOELECTRIC MATERIALS; THIN FILMS;

FILM BULK ACOUSTIC RESONATOR; PIEZOELECTRIC FILM;

ACOUSTIC RESONATORS;

EID: 0036989406     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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