Analysis of thickness-extensional waves propagating in the lateral direction of solidly mounted piezoelectric thin film resonators

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 52, Issue 4, 2005, Pages 604-609

  Nakamura, Kiyoshi ^a   Sato, Sakaki ^a   Ohta, Satoshi ^a   Yamada, Ken ^a   Doi, Arata ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b KYOCERA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE PROPAGATION; BOUNDARY CONDITIONS; ELECTRODES; FREQUENCIES; NUMERICAL ANALYSIS; RESONANCE; RESONATORS; THIN FILMS;

ACOUSTIC MULTILAYERS; ACOUSTIC WAVE RESONATORS; LATERAL PROPAGATION; WAVE NUMBERS;

PIEZOELECTRIC DEVICES;

EID: 19344366495     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2005.1428043     Document Type: Article

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