On the sensitivity improvement of CMOS capacitive accelerometer

Sensors and Actuators, A: Physical

Volumn 141, Issue 2, 2008, Pages 347-352

  Sun, Chih ming ^a   Wang, ChuanWei ^a   Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

CMOS capacitive accelerometer

Indexed keywords

CMOS INTEGRATED CIRCUITS; COST EFFECTIVENESS; MICROPROCESSOR CHIPS; SENSITIVITY ANALYSIS; SENSOR ARRAYS; STIFFNESS;

CAPACITIVE ACCELEROMETERS; SENSING FINGER ARRAYS;

ACCELEROMETERS;

EID: 38149012941     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.10.026     Document Type: Article

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