Micromachined accelerometer with modulated integrative differential optical sensing

Electronics Letters

Volumn 34, Issue 7, 1998, Pages 654-655

  Degani, O ^a   Seter, D ^b   Socher, E ^a   Kaldor, S ^b   Nemirovsky, Y ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

^b RAFAEL   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTROOPTICAL DEVICES; OPTICAL SENSORS; PHOTODIODES; READOUT SYSTEMS;

MICROMACHINED ACCELEROMETERS; NOISE EQUIVALENT ACCELERATION (NEA);

ACCELEROMETERS;

EID: 0032473651     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19980484     Document Type: Article

References (10)

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